Specifications：

l   Mechanicalpumping unit & digital vacuum gauge, ultimate vacuum of 5Pa

l   304stainless steel mating flanges: 2 sets

l   Onequartz tube of Φ45/Φ60mm(optional)

l   Twoinlets of gas & control valves

l   Bidirectionalmicrowave energy suppressor

Applications：CVDfilm growth, cleaning, or other requirements.