1、Mass flow control system of gas

 Simple flow controller: 1 set

 Qixinghuachuang mass flow controller: 1 set

 Gas circuit & Gas cabinet & all kinds of valves

 Automatic controlling computer and software

2、Vacuum system

 10-4Pa level，mechanical pump + molecular pump + compound vacuum gauge

 10-3Pa level，vortex pump + molecular pump + compound vacuum gauge

 10-2Pa level，mechanical pump + diffusion pump + compound vacuum gauge

 5Pa level，mechanical pump + digital vacuum gauge

3、Powerloss curve

 Module &software package

 Display by touchscreen

 Real time displayand output of the actual microwave powerconsumption curve of quantitative measurement.

4、 Hightemperature stirring device

 Stirring speed：0-200r/min, adjustable

 High-temperature &wave-transparent & heat -resistant stirrer、 SiC stirrer, alloy stirrer, graphite stirrer, optional

 Stirrer lifting system: manual/electric optional